SDM-100
Surface Defect Monitoring (SDM) System
- XY Scan, Bare Silicon Surface Inspection, manual load/unload system
- Wafer Size: 100mm, 125mm, 150mm and 200mm
- Sensitivity: 0.22um (PSL equivalent)
- Size Channels: 0.22um, 0.3um, 0.5um, 1.0um, 3.0um and 5.0um+
- Repeatability: < 5% variability of mean (see report)
- Utilities: 115VAC @ 3amp, house vacuum and temperature-controlled cleanroom environment
- Size/Weight: 30” X 30” X 30” @ 250lbs
Vision
The affordable metrology solution for measuring bare silicon wafer surface defects to reliably monitor processes for contamination
Mission
Silver Sage Idaho will deliver:
- A system that produces reliable, accurate and repeatable measurement data for process monitoring and troubleshooting
- A system that is simple to operate, dependable, easy to maintain and has a very low cost of ownership
- A system that even the smallest semiconductor industry businesses can afford to buy, use and maintain
SDM-100 System
Concept of Use
- Single wafer measurements
- Manual load/un-load
- Table-top workspace with basic utilities (power, vacuum)
Concept of Target Users
- Tool manufacture to validate tool cleanliness
- R&D Lab engineers to monitor process development cleanliness
- Process equipment engineers to validate tool cleanliness
- Process production engineers for inline SPC sampling of monitor wafers
Concept of Target Providers
- Independent semiconductor equipment sale and service companies
- Equipment manufacture that would like to license SDM-100 production
SDM-100
User Interface
Class-100 Clean Room for calibration/testing
Clean room is air-tight to ensure positive pressure and outflow
Clean room is 100% lined with 8mil plastic for easy cleaning and air isolation
Surface Defect Monitor
SDM-100
Repeatability Study
(10X scans per PSL calibration wafer)
August 2022
SDM-100 Repeatability Scan Summary
- Repeatability of 10 scans for measured PSL size class is better than 5%
- Repeatability of 10 scans for total measured wafer particles is better than 3%
- PSL sizing is consistent across the full wafer (top-bottom-left-right)
- The 0.5um size repeatability was 3.4% due to some count shifting down from 0.5um to 0.3um channels caused by temperature related detector gain drift as the cleanroom AC unit cycles on/off (75F to 80F). In a better controlled cleanroom, this will not happen.
Count by Size
Silicon Scan 0.22um PSL
Recipe | Test ID | 0.22um | 0.3um | 0.5um | 0.7um | 1.0um | 3.0um | 5.0um+ | Total |
0.22um Scan Silicon | 10X 0.2um Scan | 7544 | 208 | 28 | 8 | 60 | 40 | 140 | 8028 |
0.22um Scan Silicon | 10X 0.2um Scan | 7564 | 240 | 20 | 16 | 48 | 40 | 136 | 8064 |
0.22um Scan Silicon | 10X 0.2um Scan | 7816 | 272 | 24 | 16 | 76 | 40 | 148 | 8392 |
0.22um Scan Silicon | 10X 0.2um Scan | 7668 | 244 | 20 | 16 | 68 | 44 | 156 | 8216 |
0.22um Scan Silicon | 10X 0.2um Scan | 7700 | 228 | 8 | 16 | 60 | 36 | 136 | 8184 |
0.22um Scan Silicon | 10X 0.2um Scan | 7552 | 212 | 16 | 16 | 64 | 40 | 136 | 8036 |
0.22um Scan Silicon | 10X 0.2um Scan | 7744 | 232 | 12 | 24 | 64 | 48 | 136 | 8260 |
0.22um Scan Silicon | 10X 0.2um Scan | 7592 | 260 | 12 | 16 | 52 | 36 | 144 | 8112 |
0.22um Scan Silicon | 10X 0.2um Scan | 7580 | 236 | 8 | 20 | 48 | 48 | 136 | 8076 |
0.22um Scan Silicon | 10X 0.2um Scan | 7464 | 196 | 8 | 16 | 44 | 44 | 144 | 7916 |
| Variation | 1.4% | 10.0% | 45.9% | 24.3% | 17.4% | 10.3% | 4.8% | 1.7% |
Scan Defect Map
Silicon Scan 0.22um PSL
