W SERIES MICRO XRF
High Precision Coating Measurement System
The W Series utilizes poly-capillary optics to focus the X-ray beam to 7.5 µm FWHM, the world’s smallest for coating thickness analysis using XRF instruments. A 140X magnification camera allows precise measurement of features at this scale, complemented by a secondary low-magnification camera for live sample viewing and macro-view imaging.
Advanced Dual-Camera System
Bowman’s dual-camera system enables operators to see the entire part, zoom in with high-magnification, and pinpoint the feature to be programmed and measured with a simple click.
Precision Measurement & 3D Mapping
A programmable X-Y stage with precision less than +/- 1 µm per axis enables selection and measurement of multiple points. Bowman pattern recognition software and auto-focus automate this process. The system’s 3D mapping capability visualizes the topography of coatings on parts such as silicon wafers.
High-Resolution Detection & Software
The W Series features 7.5 µm optics, a molybdenum anode tube (with chromium and tungsten options), and a large-window Silicon Drift Detector (SDD), processing over 2 million counts per second. SDDs are the industry standard for complex films, ensuring low minimum detection limits (MDL) and superior spectral resolution.
The W Series is the 7th model in Bowman’s XRF instrument suite. It measures up to 5 coating layers simultaneously and runs Xralizer software, which quantifies coating thickness from detected photons. Xralizer provides intuitive visual controls, time-saving shortcuts, and one-click reporting, while also simplifying user creation of new applications.
General Specifications
- X-ray Excitation: 50 W Mo target Flex-Beam Capillary Optics @7.5 FWHM (Optional: Cr or W)
- Analysis Layers & Elements: Measures up to 5 layers (4 layers + base) and 10 elements per layer; composition analysis of up to 25 elements simultaneously
- Detector: Large-window Silicon Drift Detector (SDD) with 135eV resolution or better
- Primary Filters: 4 primary filters
- Focal Depth: Fixed at 0.02”
- Programmable XYZ Stage:
- XYZ Travel: 300mm x 400mm x 100mm
- XY Tabletop: 305mm x 406mm
- X-axis accuracy: 2.5µm (100µ”), precision: 1µm (40µ”)
- Y-axis accuracy: 3µm (120µ”), precision: 1µm (40µ”)
- Z-axis accuracy: 1.25µm (50µ”), precision: 1µm (40µ”)
- Digital Pulse Processing: 4096 CH digital multi-channel analyzer with automatic signal processing, including dead time correction and escape peak correction
- Camera Optics: 1/4” CMOS, 1280×720 VGA resolution
The W Series Micro XRF is a cutting-edge solution for high-precision coating measurement, ensuring exceptional accuracy, repeatability, and ease of use for a wide range of applications.
Why Choose the W Series?
The W Series offers unmatched precision, automation, and ease of use for coating thickness analysis. Whether in semiconductor, MEMS, solar, LED, or advanced materials research, it delivers reliable results with high throughput and minimal operator intervention.