AZX400 Film Thickness Measurement Instruments
AZX 400 sequential wavelength dispersive X-ray fluorescence (WDXRF) spectrometer was specifically designed to handle very large and/or heavy samples.
Accepting samples up to 400 mm diameter, 50 mm thick and 30 kg mass, this system is ideal for analyzing sputtering targets, magnetic disks, or for multilayer film metrology or elemental analysis of large samples.
Accepting samples up to 400 mm diameter, 50 mm thick and 30 kg mass, this system is ideal for analyzing sputtering targets, magnetic disks, or for multilayer film metrology or elemental analysis of large samples.
Features
- Large sample analysis
- Up to 400 mm (diameter)
- Up to 50 mm (thickness)
- Up to 30 kg (mass)
- Sample adapter system
- Adaptable to various sample sizes
- Measurement spot
- 30 mm to 0.5 mm diameter
- 5-step automatic selection
- Mapping capability
- Allows multipoint measurements
- Sample view camera (option)
- General purpose
- Analyze Be – U
- Elemental range: ppm to %
- Thickness range: sub Å to mm
- Diffraction interference rejection (option)
- Accurate results for single-crystal substrates
- Compliance with industry standards
- SEMI, CE marking
- Small footprint
- 50% footprint of the previous model
Specifications
| Product name | AZX 400 |
| Technique | Sequential wavelength dispersive X-ray fluorescence |
| Benefit | Flexibility to measure a variety of sample types, including 50 – 300 mm wafers, coupons, and sputtering targets (up to 30 kg) |
| Technology | Analytical flexibility to measure elements from Be to U, well-suited for process R&D and low-volume, high product mix environments |
| Core attributes | 4 kW sealed X-ray tube, Sequential type goniometer, Primary beam filter; Measurement spot sizes 30, 20, 10, 1, and 0.5 mm (diameter) |
| Core options | Wafer Loader, SQX (Scan Quant. X) software, CCD Camera |
| Computer | External PC, MS Windows® OS, Software: film thickness/concentration simultaneous analysis software, Fundamental Parameter software for thin film analyses |
| Core dimensions | 1376 (W) x 1710 (H) x 890 (D) mm |
| Mass | Approx. 800 kg (core unit) |
| Power requirements | 3Ø, 200 VAC 50/60 Hz, 50 A |